Spin Coating

THE SOLUTION FOR LABORATORY
COAT AND DEVELOP PROCESSES
SUSS MicroTec‘s LabSpin platform represents the latest generation of manual coater/developer systems developed specifically for laboratory and R&D.
Designed for a variety of photolithographical chemicals, the LabSpin process station provides uniform, precise and repeatable coating results thanks to its advanced process chamber design.

Description

HIGHLIGHTS

Removable bowl for quick changeover between different processes, avoiding cross contamination

Directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line

Drain bottle in front panel for easy access and monitoring of the waste level

Adjustable dispense position

Edge bead removal available

Puddle development supported by chuck oscillation for reduced development time

TOOL CONFIGURATIONSLabSpin6Up to 150 mm round or 4″ square
substrates
LabSpin8Up to 200 mm round or 6″ square
substrates
VERSIONSStand-Alone SystemTable-top version (TT)
For Integration into Wet BenchBench-mounted version (BM)
CONTROLLERGraphical User Interface
(GUI)
Touch panel with color display
Max. Number of Recipes200
Max. Number of Process Steps40
Programmable Step Time 1 – 999 s
MotorBrushless EC-motor with hollow shaft and
liquid separator
Max. Spin Speed 8 000 rpm +/- 1 rpm (with 200 mm chuck)
Max. Acceleration 4 000 rpm/s
SAFETYDigital Vacuum GaugeYes
Automatic Vacuum
Control
Yes
Closed Cover ControlYes
REQUIREMENTSPower4.6 A / 2.5 A (115 V / 230 V)
Compressed Air5 – 6 bar
Vacuummin. -0.7bar (optional)
Nitrogen5 – 6 bar (optional)
DIMENSIONS*LabSpin6/8 BM (W x D x H) 350 x 340 x 415 mm
Controller (W x D x H) 160 x 120 x 67 mm
LabSpin6/8 TT (W x D x H) 350 x 455 x 420 mm
Nguồn điện4.6 A / 2.5 A (115 V / 230 V)
Khí nén5 – 6 bar
Chân khôngmin. -0.7bar (optional)
Nitrogen5 – 6 bar (optional)
LabSpin6/8 BM (W x D x H) 350 x 340 x 415 mm
Controller (W x D x H) 160 x 120 x 67 mm
LabSpin6/8 TT (W x D x H) 350 x 455 x 420 mm

Applications in the field of semiconductor, MEMS, NEMS and Nano
THE SOLUTION FOR LABORATORY
COAT AND DEVELOP PROCESSES

Main Equipment
Connection Accessories
ADVANCED COVER PLATE FOR OPTIONAL FUNCTIONS
SYRINGE DISPENSE SYSTEM
FULLY AUTOMATIC DISPENSE SYSTEM
EDGE COATING
EDGE BEAD REMOVAL (EBR)
DEVELOPER DISPENSE SYSTEM
NITROGEN DRYING
FOOT SWITCH
Control and SOFTWARETouch panel with color display

Video

Additional information

Manufacturer

Suss

Origin

Germany

Type

Manual