The HD9800+ 3D Large Format Surface Profiling System is the world’s most advanced optical profiler for in-line data storage slider metrology. The system combines the gauge-capable optical characterization technology with advanced automation to enable optimized PTR and flatness measurement performance. HD9800+ incorporates decades of industrial HD metrology experience using white light interferometry (WLI), self-calibration, LED high-intensity illumination, operator-friendly software, and a host of other features to provide the robust, high-resolution, non-destructive performance that data storage manufacturers need to improve process quality and increase yield.



Full automation
Delivers high-speed slider CCT and PTR characterization.

Patented tip/tilt head
Enables fast automated metrology with highest repeatability.

Streamlined software
Simplifies operator-to-operator use of data storage analyses and reporting.

– Measurement TypeNon-contact, 3D surface
– Optical Objectives1.5X, 2.5X, 5X, 10X, 20X, 50X, 100X; Optional: TTM objective
– FOV Multipliers0.55X, 0.75X, 1X, 1.5X, 2.0X
– Measurement Array640×480 standard; 1392×1040 high-resolution optional
– StagesAutomated 100mm Z axis, 200mm XY stage; Optional 300mm XY stage
– Vertical Measurement Range 0.1nm to 10mm
– Vertical Resolution <0.01nm
– RMS Repeatability0.004nm
– Vertical Scan SpeedUp to 80μm/sec, user-selectable
– Lateral Spatial Sampling0.1 to 13.2μm
– Optical Resolution0.38μm/min (based on Sparrow criteria at 600nm wavelength)
– FOV8.45mm and optional stitching for larger FOV
– ReflectivityRange from 0.1 to 100%
– Step Height Metrology0.6% absolute accuracy on 2μm step
– Footprint:1245mm (W) x 775mm (D) x 1550mm (H)

Benchmark for Precision
The HD9800+ system’s vibration-tolerant design, integrated air isolation, and production-friendly architecture driven by industry road maps maintain measurement integrity during production floor usage. It’s high-resolution camera delivers the ultimate in lateral resolution and accuracy, and a wide range of hardware and analysis software features designed specifically for advanced process control result in the fastest and most gauge-capable system for data storage slider applications.

Best PTR and Flatness Capabilities
HD9800+ provides the fastest, most accurate 3D measurements for slider pole tip recession (PTR) and slider bearing surface flatness. The system also continuously calibrates to an internal, primary standard, eliminating the need for regular calibration to step heights. This self-calibration ensures long term stability and correlation, and significantly reduces qualification time. The ultimate result is the most accurate industrial metrology performance with the best reliability and serviceability on the market.


Bruker’s HD9800+ provides the fastest, most accurate 3D measurements for slider pole tip recession (PTR) and slider bearing surface flatness. Featuring a robust system design and production-friendly architecture driven by industry road maps, the system exhibits superior immunity to production floor vibration and noise.

– Optical Objectives
Optional TTM objective
– Measurement Array
1392×1040 high-resolution optional
– Stages
Optional 300mm XY stage
– Dual Accu Phase (DAP) software
Delivers absolute PTR metrology correlation to baseline AFM benchmarks for variable material sliders.
– SureVision software
Enables etch depth and position measurements without operator intervention via automatic pattern recognition of features of interest
– Light tower
Highlights operational status to factory floor personnel
– Bar code scanner
Delivers streamlined material and workflow handling

Vision 4.41 running under Windows 7, 32-bit platform

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