ZEISS EVO

The instruments of the EVO family combine high performance scanning electron microscopy with an intuitive, user-friendly experience that appeals to both trained microscopists and new users. With its comprehensive range of available options, EVO can be tailored precisely to your requirements, whether you are in life sciences, material sciences, or routine industrial quality assurance and failure analysis.

Description
Additional information

Description

HIGHLIGHTS

+ Versatile solution for central microscopy facilities or industrial quality assurance laboratories

+ Different chamber sizes and stage options that meet all application requirements –even for large industrial parts and samples

+ Maximum image quality with the Lanthanum Hexaboride (LAB6) emitter

+ Imaging and analytical excellence on non-conductive and uncoated samples

+ Multiple analytical detectors for demanding microanalysis applications

TECHNICAL DATA

– Resolution:	2 nm, 3 nm @ 30 kV SE with LaB6, W. 6 nm, 8 nm @ 3 kV SE with LaB6, W. 9 nm, 20 nm @ 1 kV SE with LaB6, W.
– Acceleration Voltage:	0.2 to 30 kV
– Probe Current:	0.5 pA to 5 μA
– Magnification:	+ ZEISS EVO 10: < 7 – 1,000,000× + ZEISS EVO 15: < 5 – 1,000,000× + ZEISS EVO 25: < 5 – 1,000,000×
– Field of View:	6 mm at Analytical Working Distance (AWD)
– X-ray Analysis:	8.5 mm AWD and 35° take-off angle
– OptiBeam Modes:	Resolution, Depth, Analysis, Field, Fisheye
– Pressure Range:	10 – 133 Pa (EasyVP), 10 – 400 Pa (Variable Pressure), 10 – 3000 Pa (Extended Pressure)
– Available Detectors:	+ SE – Everhart-Thornley Secondary Electron Detector (supplied as standard), Model: ZEISS EVO 15: CCD – Charge Coupled Device for Raman spectroscopy + HDBSD – Solid State Backscattered Electron, 4 or 5 quadrants YAG-BSD – YAG Crystal Backscattered Electron Detector, + VPSE-G4 – Variable Pressure Secondary Electron Detector C2D – Cascade Current Detector Detector C2DX – Extended Range Cascade Current Detector + SCD – Specimen Current Detector STEM – Scanning Transmission Electron Microscopy Detector + CL – Cathodoluminescence Detector ZEISS SmartEDX – Energy Dispersive Spectrometer (EDS) + WDS – Wavelength Dispersive Spectrometer EBSD – Electron Backscatter Diffraction Detector
– Maximum specimen heights:	+ ZEISS EVO 10: 100 mm + ZEISS EVO 15: 145 mm + ZEISS EVO 25: 210 mm
– Maximum specimen diameter:	+ ZEISS EVO 10: 230 mm + ZEISS EVO 15: 250 mm

Class-Leading Usability

Excellent Image Quality

EVO plays well with others

FACILITIES

Updating…

APPLICATION

Manufacturing & Assembly Industries
+ Quality analysis / quality control
+ Failure analysis / metallography
+ Cleanliness inspection
+ Morphological and chemical analysis of particles to meet ISO 16232 and VDA 19 part 1 & 2 standards
+ Analysis of non-metallic inclusions

Semiconductors & Electronics
+ Visual inspection of electronic components, integrated circuits, MEMS devices and solar cells
+ Copper wire surface and crystal structure investigation
+ Metal corrosion investigations
+ Cross-sectional failure analysis
+ Bonding foot inspections
+ Capacitor surface imaging

Steel and other Metals
+ Imaging and analysis of the structure, chemistry and crystallography of metallic samples and inclusions
+ Phase, particle, weld and failure analysis

Raw Materials
+ Morphology, mineralogy and compositional analysis of geological samples
+ Imaging and analysis of the structure of metals, fractures, and nonmetallic inclusions
+ Morphological and compositional analysis of raw chemicals and active ingredients during micronization and granulation processes